VSL scatterometry facilities and activities

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VSL scatterometry facilities and activities

Optical nanometrology is a hot topic in the high-tech industry. Increasing requirements as well as dimensional shrinkage are the best motivators to improve and develop optical measurement techniques. Check out the video below and have a brief look at the optical scatterometry used for the parametrization of nanostructures.

This video was recorded based on the research carried out in projects 20IND07 TracOptic, 20IND04 ATMOC and 20FUN02 POLight which have received a funding from the EMPIR program co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation program.