Scanning effects in coherent Fourier scatterometry

S. Roy, O. El Gawhary, N. Kumar, S.F. Pereira, H.P. Urbach, “Scanning effects in coherent Fourier scatterometry”, J. Europ. Opt. Soc. Rap. Public. 7, 12031 (2012).

Abstract:
Incoherent Fourier Scatterometry (IFS) is a successful tool for high accuracy nano-metrology. As this method uses only far field measurements, it is very convenient from the point of view of industrial applications. A recent development is Coherent Fourier Scatterometry (CFS) in which incoherent illumination is replaced by a coherent one. Through sensitivity analyses using rigorous electromagnetic simulations, we show that the use of coherence and multiple scanning makes Coherent Fourier Scatterometry (CFS) more sensitive than Incoherent Fourier Scatterometry (IFS). We also report that in Coherent Fourier Scatterometry it is possible to determine the position of the sample with respect to the optical axis of the system to a precision dependent only on the experimental noise.

The article can only be downloaded for free when your organization has a contract with the publisher.
The link to the publisher is here.

For more information contact Omar El Gawhary, oelgawhary@vsl.nl