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Picometer-level dimensional stability measurements using a balanced double sided heterodyne interferometer in air

Arthur S. van de Nes and Dirk Voigt, “Picometer-level dimensional stability measurements using a balanced double sided heterodyne interferometer in air ”, poster, Macroscale 2014, Recent Developments in Traceable Dimensional Metrology, 28-30 October 2014, BEV – Bundesamt für Eich- und Vermessungswesen, Vienna, Austria.

Abstract:
To allow dimensional stability measurements at the picometer-level of materials and joints, a balanced, double-sided heterodyne interferometer has been developed at the Dutch Metrology Institute VSL. The interferometer and measurement concept originates from an earlier cooperation with Delft Technical University and TNO. The currently achieved performance of the interferometer in air is presented, ranging from less than 15 pm at a timescale of minutes to less than 100 pm over several hours, and compared to earlier preliminary results in vacuum. The measurement methodology is discussed, including the diode laser frequency stabilisation using a reference cavity, and the detection algorithm using a fast FPGA DAQ card, in combination with an analysis of the measurement uncertainties.

Click here for the presentation.

For more information contact dvoigt@vsl.nl