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Characterisation of a balanced, double-sided, heterodyne interferometer for picometer-level dimensional stability metrology

A.S. van de Nes and D. Voigt, “Characterisation of a balanced, double-sided, heterodyne interferometer for picometer-level dimensional stability metrology”, poster, EOSAM 2014, 15-19 September 2014, Berlin, Germany.

Abstract:
The full characterisation and a selection of measurements of drift at the picometer range using a balanced, double-sided, heterodyne interferometer operating in air is presented. The achieved performance ranges from less than 15 pm at a timescale of minutes to less than 100 pm over several hours.

Click here for the poster.

For more information contact dvoigt@vsl.nl